Mechanical resonating structures and methods

Structures résonnantes mécaniques et procédés

Abstract

Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
La présente invention a trait à un appareil et à des procédés permettant de connecter des structures résonnantes mécaniques à un corps. Des ancres à éléments multiples peuvent inclure une partie flexible qui fléchit lorsque la structure résonnante mécanique vibre. La partie flexible peut présenter une longueur liée à la fréquence de résonance des structures résonnantes mécaniques. Certaines des ancres à éléments multiples incluent des éléments qui sont orientés perpendiculairement les uns par rapport aux autres. La présente invention a également trait à un microsystème électromécanique incorporant lesdites structures.

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